5 EASY FACTS ABOUT GAS DISTRIBUTOR FUNCTIONS DESCRIBED

In FIG. 1B, the plasma-cleaning system 150 is shown below the chamber 113, although other positions may perhaps alternatively be made use of, such as higher than chamber 113 as explained in U.S. application Ser. No. 10/963030, the full disclosure of which has been previously included herein by reference. With this alternate embodiment, the gap amon